An ultra-flexible modular high vacuum setup for thin film deposition
نویسندگان
چکیده
منابع مشابه
Energetic Deposition of Niobium Thin Film in Vacuum
(Abstract) Niobium thin films are expected to be free of solid inclusions commonly seen in solid niobium. For particle accelerators, niobium thin film has the potential to replace the solid niobium in the making of the accelerating structures. In order to understand and improve the superconducting performance of niobium thin films at cryogenic temperature, an energetic vacuum deposition system ...
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Electrospraying utilises electrical forces for liquid atomisation. Droplets obtained by this method are highly charged to a fraction of the Rayleigh limit. The advantage of electrospraying is that the droplets can be extremely small, down to the order of 10’s nanometres, and the charge and size of the droplets can be controlled to some extent be electrical means. Motion of the charged droplets ...
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ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 2019
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.5065786